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Waste Gas from Semiconductor IC, TFT-LCD, LED
  • Clicks:3686
  • Classification: Products and Projects Gas Treatment
  • Brief description:Treatment of Organic Waste Gas from Photoelectric Products Semiconductor Integrated Circuits, TFT-LCD and LED According to our company's experience in organic waste gas treatment in photoelectric products manufacturing industry for many years, we believe that the main production processes of organic waste gas pollution in photoelectric products are as follows: semiconductor integrated circuits, TFT-LCD, LED, printed circuit board (PCB), electronic terminal products.
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  • According to our company's experience in organic waste gas treatment in photoelectric products manufacturing industry for many years, we believe that the main production processes of organic waste gas pollution in photoelectric products are as follows: semiconductor integrated circuits, TFT-LCD, LED, printed circuit board (PCB), electronic terminal products.

    The following focuses on semiconductor integrated circuits, TFT-LCD, LED, printed circuit board (PCB) organic waste gas treatment.

    (1) Semiconductor integrated circuits
    VOCs in semiconductor manufacturing process mainly come from photolithography and development processes, in which the wafer surface is cleaned with organic solution (such as isopropanol), and the volatilization of VOCs is one of the sources of organic waste gases. At the same time, the photoresist used in the photolithography process contains volatile organic solvents, such as butyl acetate, etc. The organic waste gas generated during wafer processing also volatilizes into the atmosphere, which is another source of VOCs.

    (2) TFT-LCD
    Including inspection and testing, the production process of TFT-LCD can reach 100 multi-process. Many kinds of chemical organic solvents and special gases are used in the production process, resulting in a large amount of VOCs and complex components. The process of VOCs emission from TFT LCD panel production mainly concentrates on array engineering and color film engineering. Photolithography (glue coating, exposure and development) in array engineering, manufacturing of black matrix BM film in color film engineering, formation of color matrix film (red, green, blue, RGB), formation of protective film, formation of MVA film and PS (PHoto Spacer) film are the main processes to produce VOCs. At the same time, the volatilization of organic solvents used in the cleaning process in the box-building project will also produce a small amount of VOCs. The VOCs produced in the manufacturing process of TFT-LCD are mainly isopropanol, followed by acetone, propylene glycol monomethyl ether, propylene glycol monomethyl ether acetate, which account for more than 90% of the total VOCs.

    (3) LED
    VOCs produced in the production of LED electronic components mainly come from substrate treatment and photolithography. The main types of VOCs produced in the production of LED are trichloroethylene, propylene glycol ether ester, isopropanol, acetone, butanone and so on.

    (4) Semiconductor integrated circuits, TFT-LCD and LED waste gas treatment technologies
    In the production of semiconductor integrated circuits, TFT-LCD and LED products, the situation of exhaust gas is almost the same. Besides VOCs, it also contains acidic gas, alkaline gas and some toxic gases, with large air volume and low concentration. In general, water absorption + zeolite runner adsorption concentration - high temperature incineration combined technology is used for treatment.

    The first step is to remove acidic, alkaline and toxic gases from waste gas by water absorption tower. In some cases, acid gases, alkaline gases and toxic gases are discharged separately, and the concentration of organic substances is very low. It is only through water absorption process without adding adsorption equipment. For example, TFT-LCD etching process waste gas treatment.

    In the second step, zeolite runners (drums) were concentrated by adsorption and incinerated at high temperature to remove acidic gases, alkaline gases and toxic gases.

    The low concentration organic waste gas is absorbed and concentrated by zeolite runner (drum) and then purified by high temperature incineration. At present, this technology has been widely used abroad, especially in a large number of production enterprises of liquid crystal display (TFT-LCD) in Taiwan. The technology has high purification efficiency (up to 95%), stable operation and good safety. At present, there is no better technology to replace it in the waste gas treatment of electronic production industry.

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